The results of long-term studies of the electric field in the atmospheric surface layer on the basis of data of continuous measurements carried out at the mountain stations located one - at the beginning of the Baksan gorge, the second – on the slope of Cheget mountain in the Elbrus region are presented. The influence of solar activity on the behavior of the electric field near the earth's surface is studied.

Based on experimental studies and the theory of the electrode effect, the dependences of the reduction coefficient used in the processing of atmospheric-electric observation data on the geometry of the sensors and the size of the measured electric field are studied. In the approximation of the classical electrode effect, analytical expressions are obtained for the potential and electric field distributions near a flat electrode with a spherical inhomogeneity.

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Optimization of the RTP chamber design and regimes of rapid thermal processing for SiC substrates of 100 mm in diameter are presented. The obtained results are based on modeling of the light flux distribution in a chamber, the temperature and thermal stress distribution in the SiC substrate during rapid thermal processing. The calculated data allowed us to estimate the maximal temperature of SiC substrate during RTP which might not cause defect generation in the SiC wafer.