A mode1 to study the perf01 tilance of a Metal-] tisuI~tor-Serriiconductc~lwith intlixed inversion layer (MIWIL) solar cells as the Al/huinel-oxitJ.e/p-Si structure was developedThe solutioti iricluded the effect of cliange in cell parameters namely: doping concentration, r>xkIe thickness, mobile charge density and metal work furiclion. It also included the dependence on the mobile charge density and fixed oxide charge deiisity A back bias applied between substrate and nielal itiversion grid \\/a? added to the solution It was found out that the efficiency is sensitive to change ill exteinal tmck bias Optimization of efficiency was sought in the range, when O