003ChemInform Abstract It is shown that the In concentration in alloyed GaAs crystals has a strong influence on polishing and etching in aqueous NaOCl. The polishing rate is found to increase with In concentration and the maximum concentration of NOCl which may be used decreases with increasing In. Etching of GaAs:In with NaOCl reveals the inhomogeneity of In concentration in the crystals, and, thus, etching of GaAs:Inmay be used as a simple test of uniformity of the In distribution.
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