The characterization of bis(trimethylsilyl)ethylamine was carried out using a combination of IR, UV, 1 H, 13 C, 29 Si, and 15 N NMR spectroscopy, as well as elemental analysis. The spectral characteristics of the compound were determined. The temperature dependence of the saturated vapor pressure was established by tensimetric studies, and the thermodynamic characteristics of vaporization were calculated. Thermody namic simulation of the chemical vapor deposition was performed and was used as a basis for predicting the composition of the deposited phase complexes depending on the type of reagent and the process conditions.

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