Abstract.The results of characterization of TiAlSiON hard coatings deposited on ferric-chromium AISI Comparison of XPS valence band spectra with specially performed density functional theory calculations for two ordered and few disordered TiN 1-x O x (0≤x≤1) demonstrates that a Ti(Al)O x N y phase is formed on the surface of AISI430 steel upon the plasma enhanced magnetron sputtering, which provides this material with a good combination of high hardness and improved oxidation resistance.

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