The possibility of creation of capacitive discharge excilamps with short pulse duration was studied. There were three types ofpulsed excilamps in experiments: cylindrical glow discharge lamp, capacitive discharge iamp, high pressure volume discharge planar lamp with UV-preiomzation of discharge gap. In capacitive discharge cylindrical KrC1-excilamp, at ?222 nm the radiation pulse power through the end face of a lamp up to 2.5kW has been obtained. Powerful radiation pulses of 50 ns in duration were obtained at pulse repetition rate of 1 kHz. In case ofhigh pressure volume discharge at operating pressure of several atmospheres the radiation peak power density values were as much as 5 kW/cm2 at X25O mn, and 3.5 kW/cm2 at 2v222 nm and at X'3O8 nm. In cylindrical longitudinal excilamp with inner electrodes with Xe-I2 mixture the total pulse power of 75 kW has been obtained. The first experiments with harnessing of inductive energy stores for excilamp excitation have been carried out.