This paper covers the study of high-frequency (~ 1 GHz) ZnO piezoelectric transducer integrated on a silicon substrate able to generate both compressional and shear acoustic waves. First, to promote the longitudinal mode, an electrical matching of the transducer in this high-frequency range is effectuated. Second, to promote shear waves, new deposition conditions were applied, giving thin zinc oxide films of inclined c-axis. The RF microprobe was used to validate the transducer design and to conduct the viscosity measurements. Thus, the shear and the volume viscosity of a water droplet were measured.

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