A near-infrared image sensor with monolithically integrated Ge photodiodes is demonstrated. The technology for the integration of the Ge photodiodes into the CMOS process is outlined, and the measurement results of test-diodes and the full imager are discussed in detail. The heterojunction-photodiodes show a quantum efficiency of about 30% up to a wavelength of 1500 nm. A tensile strain of 0.17% was measured in the epitaxial Ge layer, which is in good agreement with the optically measured direct bandgap absorption edge of 1580 nm. The image sensor can be operated at room temperature or with moderate cooling.

muFly EU project started in 2006 with the idea to build an autonomous micro helicopter, comparable in size and weight to a small bird. Several scientific and technological objectives were identified. This spanned from system-level integration, high efficiency micro-actuation, highly integrated micro vision sensors and IMUs and also low processing power navigation algorithms. This paper shows how most of these objectives were reached, describing the approach and the role of each partner during the whole project. The paper describes also the technological developments achieved like the 80 g, 17 cm micro robotic-helicopter, the 8 g omnidirectional and steady-state laser scanner, the uIMU, the highly efficient micro motors, the high power-density fuel-cell and the successful graph-based navigation algorithms

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