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Представлены условия получения текстурированных пленок AlN на подложках различных материалов методом реактивного ВЧ-магнетронного распыления. Электронной микроскопией, рентгеновской дифрактометрией, энергетической дисперионной спектроскопией и спектроскопией комбинационного рассеяния света показано влияние условий получения на строение пленок. Представлены результаты использования пленок AlN в качестве пьезоэлектрического слоя устройств на поверхностных акустических волнах. Показана возможность контроля пьезоэлектрической эффективности пленок AlN по спектрам комбинационного рассеяния света.

This paper considers the influence of formation conditions on the composition and structure of polycluster diamond films, diamond-like carbon films and carbon nanowalls. Polycluster diamond films were obtained from a gas mixture of hydrogen and methane activated with arc and microwave discharges as well as by applying heat (i.e. hot-wire method). Diamond-like carbon films were obtained by using the methods of high-frequency magnetron sputtering, high-frequency diode discharge in a gas mixture of cyclohexane and hydrogen, graphite ion-beam sputtering. Carbon nanowalls were obtained from a gas mixture of hydrogen and methane activated with a direct current glow discharge. The composition and structure of synthesized carbon materials are explored by using the methods of electron and atomic force microscopy, X-ray diffractometry and Raman spectroscopy. Finally, the authors also study the interconnection between the composition and structure of synthesized carbon materials and electric and functional characteristics of cold cathodes based on them.

This work describes the technology of growing crystal metamaterials spinel ferrites. Metamaterials is one of the most promising classes of materials for use in optical devices in the microwave range and features, which can be used for creation of controlled attenuators, phase shifters, and other devices.