Femtosecond laser treatment of a glass surface was used to fabricate a multimodal roughness having regular surface ripples with a period of a few micrometers decorated by aggregates of nearly spherical nanoparticles. UV-ozone treatment followed by chemisorption of the appropriate functional fluorosilanes onto the textured surface makes it possible to fabricate a superhydrophobic coating with a specific surface resistance on the order of petaohms on a glass surface. The main advantage of the fabricated coating under severe operating conditions with abrasion loads is the significant durability of its electro-insulating properties. The longevity of the high surface resistivity, even on long-term contact with a water vapor-saturated atmosphere, is directly related to the peculiarities of the surface texture and ripple structure.

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