To carburize the clean tungsten surface, 1.0x10 -4 Torr ethylene was decomposed using a hot filament sputter gun with 0.5 kV bias potential for 10 min. The surface was then annealed to > 1000 K to form a carbide film. Both XPS and AES measurements of the surface atomic ratio revealed a characteristic carbidic carbon feature and an atomic C/W ratio between 1.0 and 1.1 using standard sensitivity factors with no detectable impurities.
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