The defective structure of p-CdTe:Cl single crystals and MoOx/p-CdTe/MoOx heterostructures were investigated by high-resolution X-wave diffractometry methods. Different models of dislocation systems were used and the dislocation densities were estimated from the Williamson-Hall plot. It is noted that significant deformations of the mismatch in the transition layer negatively affect the current–voltage characteristics of heterostructures.
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