The production worthiness of sputtered Al 2 O 3 barrier films on Gen 8.5 substrates using rotary targets on PVD array system PiVot TM is demonstrated in order to provide increased stability to IGZO AM-OLED backplanes. The achieved Al 2 O 3 layer properties and uniformity illustrate the advantages of using rotary technology.

Applied Materials' static PVD array coater using rotary targets has been developed to provide less in‐film particle, high target utilization performance by novel rotary target technology and uniform layer deposition by unique magnet motion in display industry. It has been optimized to provide highly stable and uniform thin metal oxide layer to reach uniform TFT performance for large area substrate (2500x2200mm glass size).