FTIR analysis of GO-COOH films in Figure S1, shows the characteristic C=O deformation vibrations of the carboxyl groups and those of C=C from sp 2 hybridized C of skeleton graphene, around 1716 cm-1 and 1604 cm-1 , respectively 21-25. The vibration around 1390 cm-1 can be attributed to the CH 2 groups 26 of sp 3 hybridized C although it has also been characterized as CO or C-OH bonds 21,22,27 of carboxyl groups. The deformation vibration around 1050 cm-1 is observed as a shoulder due to CO stretching of ether groups 24,25,27. Peaks present below this frequency are contributed by glass substrate on which the films are cast. Subsequent to the deposition of PEG-NH 2 onto these GO-COOH films, in the ALD reactor, characteristic PEG-NH 2 peaks are seen in

Working in concert, diamond layers and high-κ films impart opportunities for high performance MOS devices. Optimization hinges on their interfacial quality inciting investigation into diamond surface terminations and ALD parameters to ensure success.

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