A full‐field energy dispersive X‐ray fluorescence (FF‐EDXRF) imaging spectrometer that utilizes single‐photon counting analysis with a charge‐coupled device was developed in our laboratory. We evaluated the developed spectrometer with respect to its energy resolution, spatial resolution, quantitative performance, and elemental imaging and compared it with the corresponding characteristics of scanning‐type EDXRF spectrometers. In addition, we demonstrate that the limit of detection and sensitivity deteriorate as the analytical area decreases. Finally, compressed sensing, which is a widely used information‐processing technique, was applied for clearing XRF images.

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