An interferometric method to measure the slope of phase objects is presented. The analysis was performed by implementing a polarizing phase-shifting cyclic shear interferometer coupled to a 4-f Fourier imaging system with crossed high-frequency Ronchi gratings. This system can obtain nine interference patterns with adjustable phase shifts and variable lateral shear. In order to extract the slope of a phase object, it is only analyzed using four patterns obtained in a single shot, and applying the classical method of phase extraction.

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Modulation of polarization is commonly employed in optical interferometry through the use of polarizers and quarter-wave retarders. Phase shifts between interfering beams can be easily controlled with such techniques. This communication describes some details of modulation of polarization which are useful in phase shifting interferometry applied to the study of phase objects. As an application, the case of a two-beam phase grating interferometer is discussed on the grounds of polarization analysis as an example. The configuration presented does not require micro-polarizer arrays or additional software to eliminate noise caused by vibration. This system does not use a double window, and generates two beams, the separation of which can be varied according to the characteristics of the grid used. Experimental results are also given.

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This communication describes some details of polarization modulation that are useful in phase-shifting interferometry when applied to phase profile measurements of phase objects. Since non-destructive optical techniques allow surface measurement with high accuracy, a Mach-Zehnder configuration coupled to a 4-f arrangement using phase gratings placed on the Fourier plane was implemented to analyze phase objects. Each beam of the interferometer goes through a birefringent wave plate in order to achieve nearly circular polarization of opposite rotations, with respect to each other. The interference of the fields associated with replicated beams, centered on each diffraction order, is achieved varying the spacing of windows with respect to the grating period. Experimental results are presented for cases of four and nine simultaneously captured interferograms. Experimental SetupThe optical system proposed is shown in Fig. 1. It consists of a combination of a quarter-wave plate Q and a linear polarizing filter P 0 that generates linearly polarized light oriented