LTCC is used as a substrate for dew point sensor, e.g. multisensing system consisting of detection system for condensation, temperature sensors, stray field sensor for measurement of condensed water mass. All these components as well as through LTCC vias have been integrated in the LTCC substrate. The mentioned through vias enable the separation of corrosive environment from the electric contact system, the cooling element e.g. peltier element and open new application fields for in line measurement of technical and non-technical processes.