Y2O3nanoparticle suspension aqueous solution was prepared using citric acid. Then, Y2O3film was deposited using this solution with pulsed electrophoretic deposition (EPD). A dense Y2O3film of 25.7 μm thickness was obtained with deposition conditions of 0.5 wt% Y2O3concentration, bias voltage of 0.5 V, and bias frequency of 1 kHz. The respective resistivities of the as-deposited film and films heat-treated at 200°C and 400°C were 2.84 × 103 Ω·cm, 5.36 × 104 Ω·cm, and 2.05 × 106 Ω·cm. A 59.8 μm thick dense Y2O3film was obtained using two-step deposition with change of the bias voltage: a first step of 0.5 V and a second step of 2.0 V.