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CdO thin films on glass substrate were prepared by home built spray pyrolysis unit from aqueous solution of Cd(CH 3 COO) 2 ⋅2H 2 O at different substrate temperatures. X-ray diffraction (XRD) studies indicate the formation of polycrystalline cubic CdO phase with preferential orientation along (111) plane. X-ray line broadening technique is adopted to study the effect of substrate temperature on microstructural parameters such as grain size and microstrain. Scanning electron microscopy (SEM) shows that the film prepared at 250°C consists of spherical shape grains with size in nanometer range and is comparable with the XRD studies.

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