The purpose of this study is to analyze interface states (N ss ) in Au/TiO 2 (Rutile)/n-Si Schottky barrier diodes (SBDs). TiO 2 was deposited on a n-Si substrate by reactive magnetron sputtering and annealed at 900• C for 4 h in atmosphere to obtain rutile phase
Titanium dioxide (TiO 2 ) thin films were deposited on glass substrate by d.c. magnetron sputtering at 200• C substrate temperature. The thicknesses of the films were measured using stylus type profilometer. The deposited films were annealed using rapid thermal annealing (RTA) system in the O 2 ambient for 20 min at 400 and 500• C. Influence of Ar/O 2 flux ratio and annealing temperature on structural and optical properties of the samples was analyzed using X-ray diffraction (XRD) and UV-vis spectrometer in the range of 200-1100 nm. The films annealed above 400• C were crystalline with anatase phase, whereas at the as-deposited states, the films were amorphous. Optical properties such as band gap, refractive index and absorption coefficient were calculated using transmittance spectra of the samples. The influence of thermal annealing on structure and optical properties is discussed. Band gap energies of the TiO 2 films were also determined using photoluminescence(PL) measurements.
Electrical transport data for Al rich AlGaN layers grown by metal-organic chemical vapor dep osition (MOCVD) are presented and analyzed in the temperature range 135-300 K. The temperature depen dence of electrical conductivity indicated that conductivity in the films was controlled by potential barriers caused by carrier depletion at grain boundaries in the material. The Seto's grain boundary model provided a complete framework for understanding of the conductivity behavior. Various electrical parameters of the present samples such as grain boundary potential, donor concentration, surface trap density, and Debye screening length were extracted.
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