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Silicon oxycarbide (SiOC) glasses in the form of thin, dense, and crack‐free samples were fabricated according to the polymer pyrolysis route starting from cross‐linked polysiloxane. The amount of free carbon in the final SiOC materials was varied in the range 18‐60 vol%. The mechanical properties of the SiOC glasses were measured by nanoindentaion technique and revealed that both the Young's modulus and the hardness decrease with increase in the free carbon content and follow a simple rule of mixtures model.

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