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We reported a systematic study of spin-orbit torque biased magnetic sensors based on NiFe/Pt bilayers through both macro-spin modeling and experiments. The simulation results show that it is possible to achieve a linear sensor with a dynamic range of 0.1 -10 Oe, power consumption of 1W -1mW, and sensitivity of 0.1-0.5 /Oe. These characteristics can be controlled by varying the sensor dimension and current density in the Pt layer. The latter is in the range of 1 × 10 5 -10 7 A/cm 2 . Experimental results of fabricated sensors with selected sizes agree well with the simulation results. For a Wheatstone bridge sensor comprising of four sensing elements, a sensitivity up to 0.548 Ω/Oe, linearity error below 6%, and detectivity of about 2.8 nT/√Hz were obtained. The simple structure and ultrathin thickness greatly facilitate the integration of these sensors for on-chip applications. As a proof-of-concept experiment, we demonstrate its application in detection of current flowing in an on-chip Cu wire.

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