The use of original shift-and-ratio method for L,, estraction of MOS transistors with halo/pocket implants results in systematic errors for L e t A modification of the original method has been proposed and tested by simulation. The values of L,.,, generated by this method are more reasonable than the original shift-and-ratio method.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.