The physical bases for determining the ignition and quenching potentials of microplasma discharges in solutions have been developed. Chronopotentiometric, chronoamperometric dependences on the conditions for obtaining coatings and the dependence of the time constant of the transient process on the voltage and duration of the process, as well as current-voltage dependences at the rates of rise and fall of the potential voltage from 106 to 108 V/s, are obtained. The developed method is applicable to control the process of deposition of microplasma non-metallic inorganic coatings and is the basis of the technique for in situ control of coating deposition. Key words: pulsed microplasma oxidation, current-voltage dependences, controlled synthesis of oxide coatings. Keywords: pulsed microplasma oxidation, current-voltage dependences, controlled synthesis of oxide coatings.