A quartz crystal microbalance ͑QCM͒ has been used for etching yield measurements in a low energy ion beam system. The goal is to obtain etching yields for ion energies below 150 eV for various ion chemistries and target materials. Typical beam currents are about 0.5 A, and the mass change per unit time on the QCM is much smaller than that for typical QCM applications. A number of problems with the application of a QCM were encountered and a description of how they were overcome is presented in this article. Quantitative etch yield results for the etching of two different photoresists and SiO 2 down to 25 eV ion energy are presented.

Diamondlike carbon (DLC) films were prepared by high-intensity pulsed-ion-beam ablation of graphite targets. A 350 keV, 35 kA, 400 ns beam, consisting primarily of hydrogen, carbon, and oxygen ions was focused onto a graphite target at a fluence of 15–45 J/cm2. Amorphous carbon films were deposited at up to 30 nm per pulse, corresponding to an instantaneous deposition rate greater than 1 mm/s. Electrical resistivities were between 1 and 1000 Ω cm. Raman spectra indicate that diamondlike carbon is present in most of the films. Electron-energy-loss spectroscopy indicates significant amounts of sp3-bonded carbon, consistent with the presence of DLC. Scanning electron microscopy showed most films contain 100 nm features, but micron size particles were deposited as well. Initial tests revealed favorable electron field-emission behavior.

In various device fabrication processes, such as in metal gate and low resistance word line fabrication, one needs to be able to oxidize Si without oxidizing metals present. We developed such a process using a combination of H2 and O2 in the H2 rich regime. The process developed is safe and is production worthy with excellent uniformity.When carrying out the selective oxidation using H2/O2, a high Si oxidation rate is preferred which requires a high oxygen concentration. At the same time, the increase in metal sheet resistance, if any, must be small. We found that with an oxygen concentration as high as 20%, the increase in W sheet resistance is small. We present data on the oxidation rate of Si under different conditions as well as the selectivity of the process with respect to W and WN.

The stock market is one of the most important part of the financial market. However, it is difficult for investors to extract information from data. In the meantime, sentiment analysis is a hot topic in computer science. In this paper, we build an emotion dictionary for finance area. We can calculate the emotional values of finance texts based on the dictionary. Further, with a regression analysis by Fama-French model, we discovered the relationship between the emotional value and stock price by experiments. Simply put, the emotional value and stock's return rate did not have a significant correlation; the emotional value and stock's volatility don't have a significant correlation; but the emotional value and stock' relative return rates had a positive correlation.