A robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. The developed P-R-R type 3 DOF robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this manipulator, a micro gripper is designed and fabricated with MEMS technology, and the displacement of the jaw is up to 142.8 μm. A real gripping test is conducted to evaluate the robotic system.

A set of design for manufacturing (DFM) techniques have been developed and applied to 45nm, 32nm and 28nm logic process technologies. A noble technology combined a number of potential confliction of DFM techniques into a comprehensive solution. These techniques work in three phases for design optimization and one phase for silicon diagnostics. In the DFM prevention phase, foundation IP such as standard cells, IO, and memory and P&R tech file are optimized. In the DFM solution phase, which happens during ECO step, auto fixing of process weak patterns and advanced RC extraction are performed. In the DFM polishing phase, post-layout tuning is done to improve manufacturability. DFM analysis enables prioritization of random and systematic failures. The DFM technique presented in this paper has been silicon-proven with three successful tape-outs in Samsung 32nm processes; about 5% improvement in yield was achieved without any notable side effects. Visual inspection of silicon also confirmed the positive effect of the DFM techniques.

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