열변형 오차의 70% 이상이 스핀들의 발열에 기인한 것으로 연구된 결과가 있다 (Bryan, 1968;Srinivasan and Zigert, 1996).

A finite element model of an ultra-precision grinding machine that can have high precision and high stiffness is constructed and structural analysis is done with equivalent stiffnesses of linear motion guides by after structural design and the deformation of the grinding machine is obtained. In order to reduce the deformation of the grinding machine that causes bad influence, structural complement is conducted by adding ribs at the lower part of the column. Also, the straightness of the grinding machine is improved by lifting that the base side of the column.