Interaction of charged particles -protons, nitrogen, oxygen and carbon ions with LiF single crystals were studied using lyoluminescence method. Obtained linear energy transfer profiles were compared with those ones calculated by Monte Carlo method. The shape of the calculated and measured profiles was found to be comparable with Brag's curve. Analyses of differences in shape of calculated and experimentally measured curves were performed. It is demonstrated that by gradually dissolving the crystal in the form of a disk, rotating it with constant angular rate around its axis of symmetry, it is possible to determinate the defect distribution over the crystal depth with a resolution of the order of 1µm according to measurements of lyoluminescence intensity. Also, a good precision of lyoluminescence intensity measurement and agreement of experimental energy loss profiles with the theoretical ones are noted. Significant deviations from calculated profiles were observed in distances closer than 10 -6 m to solid surface.
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