QUALCOMM has developed and transferred to manufacturing iMoD™ displays, a MEMS-based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales up to enable fabrication on flat-panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.

QUALCOMM has developed and transferred to manufacturing iMoD Displays, a MEMS‐based reflective display technology. The iMoD array architecture allows for development at wafer scale, yet easily scales‐up to enable fabrication on flat‐panel display (FPD) lines. In this paper, we will describe the device operation, process flow and fabrication, technology transfer issues, and display performance.