The feasibility of the charge-transfer based polymer resistive memory as a future data storage device was tested using a thermally robust polyimide and PCBM composite film, available by low-cost solution processing. The prototype device with a simple 4F 2 cross-point cell structure demonstrated basic non-volatile memory functions (> 1000 write/erase cycles and 1-week data retention in an ambient without encapsulation). Not only bi-polar but also uni-polar operation scheme with multi-level programming worked for the device. The cells on both the top and the bottom layers of a stacked device with additional heat budget of > 300 o C for 1 hour exhibited no degradation on the performance.

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Array CD uniformity can be measured by inspection tool and showed good correlation to traditional CD measurement such as CD-SEM and OCD. [1] Due to the inspection tool's basic requirement which collects information over whole area of wafer, the CD mapping from inspection images results in high spatial details within shot and along the wafer scale.However the reflected light which comes from the interaction between sub-wavelength array pattern and illuminated light isn't only responsible for CD variation of the illuminated area pattern. Other than lateral CD differences, thickness variation of pattern and under layer films also result in light intensity changes on reflected light. Therefore the noise separation other than CD variation is crucial factor on CD mapping using inspection tool. On the other hand, the sensitivity of CD variation is dependent on the patterned layer materials and how it interacts with the polarization of illuminated light.From previous study, reflection light from sub wavelength array structure contains CD variation information and gives linear response to the structure volume change. In this paper, CD test box which has intentional CD variation is introduced to investigate on various parameters that result in reflectivity changes. Wavelength, polarization and optical property of patterned structure are conducted to analyze the influence to the reflectivity signal. In parallel the experimental results are compared with simulation result using RCWA and good correlation is achieved.