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Fine-structured ZnO patterns with sub-micrometer based on a replication method was fabricated. A replication method was used mixtures of polyvinyl alcohol (PVA) and ZnO nanosized particles in water. The mixtures were then filled in a quartz mold with different pattern sizes and dried at room temperature. After the drying, the PVA and ZnO dried film was detached from the mold. Through burn-out at various sintering temperatures, ZnO patterns with line and space patterns as smalls as submicrometer in size were successfully fabricated. The results demonstrated possibilities to produce inorganic materials with various compositions and structures with a facile approach and a simple method.

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