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The performance of micro and large-sized parallel robots is improved by implementing machine-oriented control tasks. Internal sensors integrated in structural robot components like rods and joints transmit relevant data for this purpose. Considering this background, linear and angular sensors have been developed at the Institute for Microtechnology during the last years. In this paper, the new generation of MEMS position sensors for such applications is introduced. The presented sensors are characterized by an easy integration in parallel kinematics and contactless working principles with high resolution. Micro manufacturing and characteristics are discussed and the suitability of the sensors for parallel robotics is pointed out.

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