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Polycrystalline Cd thin films were evaporated in a vacuum onto glass substrates at Cd source temperature of 770 K. The as-deposited Cd films were subjected to a gradual heating at the rate of 5 K/min, up to a temperature of 650 K and were then maintained at this temperature for 5 min. Then, the respective samples were cooled down to room temperature at the same rate. The obtained CdO thin films were UV irradiated for 2h (150W mercury lamp, 3.18-3.65 eV). By means of XRD, AFM and XPS techniques, the structural characteristics of the typical obtained CdO samples before and after UV treatment were been investigated. The obtained results indicate that the UV treatment induces a recrystallisation process: changes in sample morphology, surface roughness and crystallite size and orientation. XRD and XPS studies evidenced an improvement in crystalline structure and stoichiometry. UV irradiated sample shows photo-catalytic properties.