In the present study, a tungsten rod with diameter of 100μm is used as the tool to drill a quartz plate by Electrochemical Discharge Machining (ECDM). KOH solution mixed with different concentration of Ethanol is used as the electrolyte. The influences of different working parameters, such as electrolyte concentration, applied voltage, pulse frequency, and electrolyte level, on the gas film stability, gas film thickness, and machining accuracy are investigated. The experimental results show that the overcut and surface roughness is improved by the use of electrolyte with addition of 6.5wt% ethanol. The effect of gaseous bubbles is reduced during the machining, and the circulation of electrolyte is better. Compared with machining with pure KOH electrolyte, the overcut is reduced around 57% by the use of electrolyte with addition of 6.5wt% ethanol. The heat-effected zone on the machining is also largely reduced.
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