Structural, optical, and acoustic characterization of high-quality AlN thick films sputtered on Al 2 O 3 ( 0001 ) at low temperature for GHz -band electroacoustic devices applications J. Appl. Phys. 96, 2610 (2004); 10.1063/1.1777809 Effect of low substrate deposition temperature on the optical and electrical properties of Al 2 O 3 doped ZnO films fabricated by ion beam sputter deposition
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