CMOS-MEMS integration is getting a more and more important topic with growing expectations and requirements on the function and performance of micro sensors [1]. The integration of ASICs and memories to MEMS sensor structures allows by calibration the compensation of side effects (temperature influences, stress influences,…) and manufacturing tolerances. Thus, very accurate sensors, at acceptable cost structures for high volume applications become feasible. These high volume applications are often for mobile devices or other use cases where the form factor is important as well – here the wafer level integration and the wafer level packaging (wafer bonding) also offer many opportunities.

We present simulation and experimental results to achieve increased light extraction of a substrate emitting OLED. We present a comparison between a grating surface on the OLED and an array of microlenses at the interface between substrate and air. This experimentally gives -in both cases-a relative improvement of approx. 30 %. We also demonstrate the concept of a RC 2 LED, applied to an OLED. The RC 2 LED is composed by adding a high, low and high index layers between ITO and glass, i.e. the interface between organic layers and glass. These extra layers create a cavity which numerically gives a relative improvement of over 60% at the resonance wavelength of the cavity over a wavelength range of 50-100 nm. The influence of an array of micro lenses in addition to the RC 2 layers is also investigated in this paper.

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An important limiting factor for efficient white light emitting organic LEDs is the total internal reflection occurring at each interface. In a bottom emitting OLED light is trapped by reflection at the interface between the organic layers and glass substrate and at the interface between the glass substrate and air. We investigate the use of a grating at the glass substrate-air interface. In this paper we will discuss the developed 3D-simulation method and several important simulation results. Our simulation method shows that the grating extracts approximately 50% more power in comparison with a planar device. These results are comparable with the use of micro lenses.