This paper presents a novel ultraviolet (UV) irradiation assisted nanostructured ZnO film for high performance oxygen sensing under a low working temperature. Nanorod ZnO structures with high exposing area are synthesized on a glass substrate with interdigital sensing electrodes via the developed two-stage sol-gel and hydrothermal processes. A UV-LED with an emission wavelength of 370 nm is then used to enhance the sensing performance of the nanostructured ZnO film. The oxygen sensor can work at a temperature of 50 C with the assistance of UV irradiation. The response of the UV-assisted ZnO film is 4.66 times larger than the same film without UV exposure. The method developed in the present study provides a simple yet high performance method for oxygen sensing under low operation temperatures.

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