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A roll of transparent conductive ITO/Ag/ITO film was prepared by Roll to Roll sputtering. The effects of deposition parameters on microstructure, electrical and optical properties of films were investigated. We obtained the optimum properties of films with a sheet resistance of 8.6±0.2Ω/□ and an optical transmittance of 86.6±0.5 % atλ=550nm .

We sputtered a Nb 2 O 5 /Ag/IZO transparent conductive film on PET substrate. The conductivity of transparent conductive film (TCF) was mainly dependent on the Ag layer, and Nb 2 O 5 and IZO were two materials to design an anti-reflection coating. The sheet resistance was 7.9Ω/□ with a 7.9 nm-thickness-Ag layer, and the transmittance was 90.11% at λ=550 nm.

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