The piezo-actuated stages are composed of the piezo-electric actuator and the positioning mechanism. The positioning accuracy of the piezo-actuated stage is limited due to hysteretic nonlinearity of the PEA and friction behaviour of the positioning mechanism. To compensate this nonlinearity of piezoelectric actuator, a PI feedback control associated with feedforward compensating based on the hysteresis observer is proposed in this paper. To verify the consistency of the proposed method, the experiments are implemented by real-time control to be compared with the numerical simulation.

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