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With the development of flexible electronics, flexible microheaters have been applied in many areas. Low power consumption and fast response microheaters have attracted much attention. In this work, systematic thermal and mechanical analyses were conducted for a kind of flexible microheater with two different wire structures. The microheater consisted of polyethylene terephthalate (PET) substrate and copper electric wire with graphene thin film as the middle layer. The steady-state average temperature and heating efficiency for the two structures were compared and it was shown that the S-shaped wire structure was better for voltage-controlled microheater other than circular-shaped structure. In addition, the maximum thermal stress for both structures was from the boundary of microheaters, which indicated that not only the wire structure but also the shape of micro heaters should be considered to reduce the damage caused by thermal stress. The influence resulting from the thickness of graphene thin film also has been discussed. In all, the heating efficiency for flexible microheaters can be up to 135 °C/W. With the proposed PID voltage control system, the response time for the designed microheater was less than 10 s. Moreover, a feasible fabrication process flow for these proposed structures combing thermal analysis results in this work can provide some clues for flexible microheaters design and fabrication in other application areas.

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