Off-axis illuminalion (OAT) has been shown as one of the most practical resolution enhancement techniques (RET) available for optical lithography. A customized off-axis illumination aperture ifiter (CIF) was designed to gain the benefits of OAI and keep the optical proximity effect (OPE) in a manage-able range for sub-0. 18im line and space patterns. The performance of the filter comparing with conventional, annular and quadrupole illuminations in terms of depth of focus (DOF), OPE, throughput, dose and power unifonnity for both 0. 18im and 0. l5jnn on a 0.55 NA Nikon KrF excinier laser stepper with a maximum partial coherence factor of 0.8 is presented in the paper. A brief description of the design principle of the ifiter is also given. A summarized conclusion on the weakness ofthe ifiter and possible improvements is also presented in the paper.

We apply multiphoton microscopy for the qualitative imaging and quantitative analysis of hepatocellular carcinoma (HCC) of different grades under ex-vivo, label-free conditions, and found that multiphoton autofluorescence (MAF) is effective in identifying cellular architecture in the liver specimens, and can be used to obtain quantitative parameters for characterizing the disease. Our results demonstrates the capability of using tissue quantitative parameters of multiphoton autofluorescence (MAF), the nuclear number density (NND), and nuclear-cytoplasmic ratio (NCR) for tumor discrimination, and the potential of this technique in clinical diagnosis of HCC and in in-vivo investigation of liver tumor development of animal models.

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