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Exchange-biased electrodes IrMn/Ta(2 Å)/CoFe/ AlO and IrMn/CoFe/Ta(2 Å)-AlO used in a magnetic tunnel junction were annealed at 300 C to study the Mn diffusion characteristics. Auger electron spectroscopy and X-ray photoelectron spectroscopy analysis of the annealed electrodes show that the Ta diffusion barrier effectively blocked the Mn migration, regardless of the barrier location. Also concluded from the study was that the Mn migration is largely enhanced by the preferential oxidation of Mn.

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