The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/adom.202201375.

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The article discusses the possibilities of fine composition variation of polycrystalline PZT films at the morphotropic phase boundary. The composition of thin films prepared by RF magnetron sputtering of a ceramic target of stoichiometric composition PbZr 0.54 Ti 0.46 O 3 was varied by changing the distance from the target to the substrate in the range of 30-70 mm. This made it possible to change the composition by ~1.5%. The study focused on the dielectric properties of the formed self-polarized films. The study found that the resistance to external electric fields depends on the conditions of film preparation.