Al/Ti films were deposited on 128°Y-X LiNbO 3 substrates by electron-beam (e-beam) deposition. Low-energy Ar ion beam bombardment was employed during the Ti underlayer deposition. Influence of low-energy beam bombardment on the texture of Al/Ti films was investigated by x-ray diffraction (XRD) analysis. It was found that Al films deposited on Ar-ion bombarded Ti underlayers possessed excellent (111) texture. With the textured Al/Ti films, a 2.3-GHz range image-impedance connection surface acoustic wave (SAW) filter was successfully fabricated.

We provided a microbeads preparation method with reversed-phase microemulsion and ultraviolet light curing for laser induced breakdown spectroscopy based digital encoding suspension array. By combining reversed-phase microemulsion and ultraviolet light curing together, we created an one-step system for preparation of microbeads. The stability and universality of this method had been confirmed in preparation of microbeads with different encoding materials. With further experiments in surface modification and multiplexed detection, we proved that the synthesized microbeads were available to prepare suspension array and could provide accurate encoding performance in multiplexing.