Highly reflective LaF(3)/MgF(2) systems for a wavelength of 248 nm on MgF(2) and crystalline quartz substrates were investigated. The influence of laser conditioning on damage threshold and absorptance was remarkable in those coatings that had a high initial absorptance. Monitoring with a laser calorimeter revealed the conditioning effect to be a function of the irradiation dose rather than of energy density or pulse rate. Furthermore, x-ray photoelectron spectroscopy and transmission electron microscopy investigations showed that conditioning induces stoichiometric and structural changes in the multilayers, especially in near-surface sublayers, whereas scanning electron microscopy and atomic force microscopy investigations indicated that the surface remains unchanged.

Micro and nano optics enable the control of light for producing intensity distributions with given profiles, propagation properties and polarization states. The higher the requirements on the optical function, the more complicated will be its realizing with a single element surface or a single element class. Combinations of refractive and diffractive, both diffractive or sub-wavelength structures with each other give the ability to link the advantages of different element classes or different element functions for realizing the optical functionality. In the paper we discuss two different examples of combinations for DUV applications. In detail we present a diffractive -diffractive beam homogenizer with NA of 0.3 that show no zero order. A binary phase grating for polarization control combined with a beam shaping element will be presented. The polarized order of this grating shows an efficiency of about 90% with a degree of polarization better than 90%. Wave optical and rigorous design strategies and simulations as well as the optical measurements will be discussed for the given examples.

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