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The impact of dopant concentration on the current densities of In0.53Ga0.47As/GaAs0.5Sb0.5 heterojunction Esaki tunnel diodes is investigated. Increased doping density results in increased peak and Zener current densities. Two different structures were fabricated demonstrating peak current densities of 92 kA/cm2 and 572 kA/cm2, Zener current densities of 994 kA/cm2 and 5.1 MA/cm2 at a −0.5 V bias, and peak-to-valley current ratios of 6.0 and 5.4, respectively. The peak current scaled linearly with area down to a 70 nm diameter. The peak current densities were benchmarked against Esaki diodes from other material systems based on doping density and tunnel barrier height.

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