A B S T R A C TElectron energy loss spectroscopy (EELS) in combination with transmission electron microscopy (TEM) is widely used for chemical state analysis of variety of chemical compounds. High beam sensitivity of substances like polymers hinders the possibility of exploring in-depth analysis provided through the high spatially resolved EELS spectroscopy. In this study, the electron beam irradiation damage on polymers were analyzed with varying dose of electron beams. The stability of the polymers under electron beam exposure depends on the chemical structure on the polymers. In this study the polymers with and without phenyl groups namely Polycarbonate, Polyethylene terephthalate, Polystyrene, Styrene Maleic Anhydride and Polymethylmethacrylate are selected for the comparative degradation study. Effect of varying the electron dose on the stability of polymers were monitored by recording the low-loss EELS spectrum in π to π* transition and (π+σ) to (π+σ)* transition region.