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High-beam-current microcolumns with large apertures were fabricated using a new process to improve etch uniformity and the quality of apertures of microlens. The properties of microcolumns were examined by varying the beam energy from 200 to 800 eV. The probe beam current of the sample was measured to be up to ∼5 nA at a total beam current of ∼1 µA and a working distance of ∼1 mm. The microcolumns readily distinguished carbon nanotube (CNT) sample wires with a diameter of 100 nm. The fabrication processes and the properties of high-beam-current microcolumns are presented.

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