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Optical properties ͑transmission and refractive index͒ and chemical structure ͑x-ray photoelectron spectroscopy͒ of a diamond-like coating ͑DLC͒ before and after focused ion beam milling ͑FIBM͒ process were investigated in this article. We find no influence of FIBM on optical properties and chemical structure of the DLC in the near-infrared region. The film can be used for optical applications. As an application example, a diffractive optical element ͑DOE͒ was directly fabricated on the film by FIBM. The measured diffraction efficiency of the DOE is 73%, which is acceptable for conventional use.