Optical, electrical and structural properties of VOx/ZnO/VOx thin film are studied. The VOx/ZnO/VOx multilayer is deposited by using a radio frequency (RF) sputtering system.The VOx/ZnO/VOx thin film shows the high temperature coefficient of resistance (TCR) of −3.12%/ o C and the low sheet resistance of about 80 kΩ/sq at room temperature. The responsivity and detectivity of the bolometer are measured as a function of modulation frequency.
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